Abstract: The structure and ferroelectric properties of PbZr0.53Ti0.47O3 thin films were investigated in detail by using the x-ray diffraction technique. The surface morphology of the film was studied by using the atomic force microscopy technique, showing a film with a dense morphology and a smooth surface. Based on recent results reported by Pandey et al (2008 Acta Crystallogr. A 64 192), Rietveld refinements of the structure were conducted considering different models proposed in the literature. Results suggested the monoclinic and tetragonal (M + T) phase coexistence, with P4mm and Cm space groups, respectively. The monoclinic phase (68 mol%) is dominant over the tetragonal phase (32 mol%) for this PZT film composition Ver menos