The fabrication and characterization of planar polymeric waveguides produced on silicon substrate for optical devices is reported. The cladding was made of a fluorinated polymer by CHF3 plasma polymerization and the core was a PMMA film prepared by spin coating. The polymeric waveguides with different widths (from 10 to 100 μm) were patterned by UV photolithography. The plasma fluorinated optical films were characterized by ellipsometry, metricon prism coupler, interferometer and FTIR-ATR. The waveguide optical characterization was done by coupling a laser beam, fiber-to-fiber coupling method, using a multimode optical fiber Ver menos