Fabrication and characterization of polymeric optical by plasma fluorination process

Fabrication and characterization of polymeric optical by plasma fluorination process

Virginia Mansanares Giacon, Giovana da Silva Padilha, Julio Roberto Bartoli

ARTIGO

Inglês

The fabrication and characterization of planar polymeric waveguides produced on silicon substrate for optical devices is reported. The cladding was made of a fluorinated polymer by CHF3 plasma polymerization and the core was a PMMA film prepared by spin coating. The polymeric waveguides with...

Fechado

Fabrication and characterization of polymeric optical by plasma fluorination process

Virginia Mansanares Giacon, Giovana da Silva Padilha, Julio Roberto Bartoli


										

Fabrication and characterization of polymeric optical by plasma fluorination process

Virginia Mansanares Giacon, Giovana da Silva Padilha, Julio Roberto Bartoli

    Fontes

    Optik

    Vol. 126, no. 1 (Jan., 2015), p. 74-76