Effect of the plasma excitation power on the properties of SiOxCyHz films deposited on AISI 304 steel

Effect of the plasma excitation power on the properties of SiOxCyHz films deposited on AISI 304 steel

Nazir M. Santos, Thais M. Goncalves, Jayr de Amorim, Celia M. A. Freire, Jose R. R. Bortoleto, Steven F. Durrant, Rafael Parra Ribeiro, Nilson C. Cruz, Elidiane C. Rangel

ARTIGO

Inglês

Films were produced on stainless-steel substrates by radiofrequency Plasma Enhanced Chemical Vapor Deposition (RF-PECVD) of mixtures containing 70% hexamethyldisiloxane, 20% oxygen and 10% argon. While the plasma excitation power was varied from 15 to 75 W, the deposition time and total gas pressure...

CONSELHO NACIONAL DE DESENVOLVIMENTO CIENTÍFICO E TECNOLÓGICO - CNPQ

FUNDAÇÃO DE AMPARO À PESQUISA DO ESTADO DE SÃO PAULO - FAPESP

Fechado

Effect of the plasma excitation power on the properties of SiOxCyHz films deposited on AISI 304 steel

Nazir M. Santos, Thais M. Goncalves, Jayr de Amorim, Celia M. A. Freire, Jose R. R. Bortoleto, Steven F. Durrant, Rafael Parra Ribeiro, Nilson C. Cruz, Elidiane C. Rangel


										

Effect of the plasma excitation power on the properties of SiOxCyHz films deposited on AISI 304 steel

Nazir M. Santos, Thais M. Goncalves, Jayr de Amorim, Celia M. A. Freire, Jose R. R. Bortoleto, Steven F. Durrant, Rafael Parra Ribeiro, Nilson C. Cruz, Elidiane C. Rangel

    Fontes

    Surface and coatings technology

    Vol. 311 (Feb., 2017), p. 127-137